Solvent for semiconductors
Solvent for semiconductors
With the advancement of semiconductor miniaturization, the need for high purity chemicals has become more critical than ever.
As linewidths continue to shrink, preventing even the smallest defects is essential to maintaining production yield.
Therefore, resist solvents and thinners with fewer impurities, such as metals that can cause defects, are required. We offer low-metal grade solvents to meet the demands of cutting-edge technologies.
Semiconductor Technology Evolution
Highering chemicals associated with semiconductor miniaturization (illustration)
We are a leading manufacturer of PGMEA (MMPGAC is a registered trademark). We are the only company that produces PGMEA from start to finish in Japan, and we offer a variety of low metal grades PGMEA with less than 100 ppt.
Our quality assurance system, complete with clean rooms and ICP-MS/MS, ensures high quality and a stable supply system to meet cutting-edge requirements.
We also have a long track record with solvents used in front-end processes, such as PGME and 7:3 thinner, so please feel free to contact us if you are having trouble with solvents related to semiconductor manufacturing.
Daicel's solvent for semiconductors
- Low metal content (various grades available with less than 100ppt metal) - please contact us for details.
- Integrated production of PGME and PGMEA ensures high quality and stable supply
- Providing quality assurance and logistics suited to semiconductors
【List of solvents for semiconductors】
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| product | boiling point |
grade | Main Applications | Packing |
|---|---|---|---|---|
| PGMEA/Low Metal (MMPGAC-P) |
146 | Various types available with less than 100ppt (please contact us for details) |
semiconductors resist/process thinner | Tank trucks, drums |
| PGMEA/General products （MMPGAC） |
146 | General/No metal standard | semiconductors resist/process thinner | Tank trucks, drums, cans |
| PGME(MMPG) | 121 | Metal standards under review | semiconductors resist/process thinner | Tank trucks, drums, cans |
| MBA/Low Metal （MBA-P） |
171 | Less than 10 ppb | semiconductors resist/Liquid crystal (FPD) resist Photo spacer solvent, etc. |
Drums |
| MBA/General products | 171 | General/No metal standard | semiconductors resist/Liquid crystal (FPD) resist Photo spacer solvent, etc. |
Tank trucks, drums, cans |
| Butyl Acetate | 126 | Metal standards under review | Negative Photoresist Developer | Tank trucks, drums, cans |
| 7:3 Thinner （PGME/PGMEA） |
128.5 | Metal standards under review | EBR/Pre-wet thinner | Tank trucks |
We have a wide range of industrial-grade high boiling point solvents for applications other than semiconductors, and the variety is among the best in the industry. With our track record and knowledge gained through our experience in use by many resist manufacturers and related material manufacturers, we can propose the optimal solvent to suit your materials and processes.