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Resist monomers for ArF lithography Resist monomer
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Caprolactone derivatives Placcel H
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ANBL
[ANBL]
Formula
IUPAC or Common name
5-oxo-4-oxatricyclo[4'2'1'03'7]nona n -2-yl acrylate
Mole. Wt.
208
Composition formula
C
11
H
12
O
4
CAS No.
242129-35-7
Application
Raw material for Photoreist polymer
Packing
Fiber drum(10kg)
*Please look at MSDS about detailed product information, including regulation relation etc.
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